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Metrology Operations Support

Maintenance and Monitoring for Sensitive Equipment

ProActive provides the monitoring, calibration, operation and preventative maintenance services your metrology equipment requires to function at peak levels within the cleanroom.

We have more than a decade of experience supporting a variety of metrology needs, including:

  • Tool maintenance
  • KPI monitoring
  • Calibration
  • Tool supplier management
  • SPC process support
  • Tool shutdown and startup schedule maintenance