Metrology Support

ProActive provides semiconductor cleanroom metrology equipment monitoring, calibration, operation, and preventative maintenance services to deliver to our clients the tool availability they need for optimal cleanroom functioning.  With over ten years of experience, we can support a wide variety of metrology tools.

Services

• Tool Maintainence
• KPI Monitoring
• Calibration
• Tool Supplier Management
• SPC Process Support
• Tool Shutdown and Startup Schedule Maintenance

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